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Bernoulli chuck with vertical gas jet method

Non-contact suspension transport of workpieces using air jets! Bernoulli chuck.

The new mechanism adopts the "vertical gas jet method." This method allows the gas flow ejected from the nozzle to create a vertical gas jet in the cushion chamber, reducing friction losses of the gas flow within the chamber, enhancing the effect of negative pressure generation, and significantly increasing the suspension capacity compared to conventional types. This results in improved stability of the holding mechanism, increased resistance to shocks, and nearly halving the gas consumption. The "float chuck" generates negative pressure through the ejector effect and Bernoulli effect by ejecting gas, as well as positive pressure through the pressure-type air cushion effect, allowing the workpiece to be suspended in a non-contact state while floating in the air, enabling transportation, inversion, and tilting.

  • Wafer
  • CVD Equipment
  • Articulated Robot

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Gas vertical jet type Bernoulli chuck "Float chuck SAC type"

Bernoulli chuck "Float Chuck SAC type" adopting a gas vertical jet method that reduces airflow friction loss.

We will manufacture custom-made Bernoulli chuck systems and non-contact transport devices using the Bernoulli chuck "Float Chuck SAC type," developed through inventions at the Solar Research Institute, based on our extensive delivery track record. - Non-contact transport device for wafers - Non-contact transport device for glass substrates - Non-contact tweezers - Non-contact transport device for solar cell wafers - Non-contact transport device for wafer chips - Non-contact transport device for lenses - Non-contact transport device for films - Non-contact transport device for printed circuit boards and FPC - Non-contact transport device for non-woven fabrics - High-precision inspection table with air levitation - Sheet feeding device

  • Wafer
  • Other semiconductor manufacturing equipment
  • Wafer

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